A multiple-state micro-mechanical programmable memory
نویسندگان
چکیده
0167-9317/$ see front matter 2011 Elsevier B.V. A doi:10.1016/j.mee.2011.08.004 ⇑ Corresponding author. Tel.: +1 517 432 2130. E-mail address: [email protected] (N. Sepúlved This paper reports a multiple-state micro-mechanical memory. The tip displacements of a 350 lm long VO2-coated micro-mechanical silicon cantilever were programmed to absolute displacements ranging from 19 to 7 m. Ten non-uniform mechanical states were programmed using controlled linearly increasing laser pulses. The uniformity of the mechanical states was improved by using non-linearly increasing laser pulses. The programmed states are reset by driving the VO2 outside the hysteretic region. 2011 Elsevier B.V. All rights reserved.
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